Role of Pneumatic Tubing in Semiconductor Equipment

Pneumatic systems in semiconductor equipment can be used for wafer lifting, positioning, and handling, as well as gate valve opening and closing. They can also support various automated operations in semiconductor packaging and test equipment.

Pneumatic tubing is mainly used to connect the compressed air supply, solenoid valve manifolds, and actuators such as pneumatic cylinders and pneumatic grippers. It carries compressed air to different control points.

Common Pneumatic Applications in Semiconductor Equipment

Pneumatic Mechanisms for Wafer Lifting, Positioning, and Handling

When pneumatic actuation is used for wafer lifting, positioning, or handling, the required motion can be performed by pneumatic cylinders or other pneumatic actuators.

Pneumatic tubing connects the control components to the actuators.

If the tubing moves or bends with the mechanism, the range of tubing movement, bend radius, and repeated bending conditions should be considered.

If the tubing remains largely stationary, a suitable tubing material can be selected based on the actual operating conditions.

Gate Valves and Other Pneumatic Opening/Closing Mechanisms

Load-lock chambers, handling systems, and process chambers in semiconductor equipment may incorporate gate valves or other pneumatically actuated opening/closing mechanisms.

Pneumatic tubing connects the control components to the relevant actuators and supplies the compressed air required for actuation.

The routing method and connection path can be planned according to the locations of the control components and actuators.

Pneumatic Mechanisms in Advanced Packaging and Test Equipment

Pick-and-place, transfer, positioning, gripping, or pressing operations in advanced packaging and test equipment may use pneumatic cylinders, pneumatic grippers, or other pneumatic actuators.

When multiple pneumatic actuators are installed in the same equipment, tubing should be planned according to the location and motion of each component.

If multiple pneumatic control lines are required, the number of pneumatic lines, routing paths, branch points, and line identification should also be considered.

Pneumatic Routing and Product Selection

Actual tubing selection should be based on the routing method and operating conditions, rather than solely on the equipment application.

This page mainly covers pneumatic control and automation tubing applications in semiconductor equipment.

It does not cover process gas, ultra-high-purity gas, or high-purity chemical delivery systems.

→ PU Tubing

→ Nylon Tubing

→ One-Touch Fittings Overview | Classification and Selection Criteria

→ PU Tubing vs. Nylon Tubing: Selection and Application Differences

→ How to Select Pneumatic Tubing: A Guide to Routing Methods and Operating Conditions

→ Pneumatic Tubing, One-Touch Fittings, and Valves: How They Work Together in Pneumatic Systems